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Title: Miniature surface-mountable Fabry–Perot pressure sensor constructed with a 45° angled fiber
Authors: Bae, H
Zhang, X 
Liu, H
Yu, M
Issue Date: 15-May-2010
Source: Optics letters, 15 May 2010, v. 35, no. 10, p. 1701-1703
Abstract: We present a surface-mountable miniature Fabry–Perot (FP) pressure sensor that utilizes the total internal reflection at a 45° angled fiber end face to steer the optical axis by 90°. By using the fiber as a waveguide, as well as a natural mask in photolithography, an FP cavity is constructed on the sidewall of the fiber. A polymer–metal composite diaphragm is employed as the pressure transducer. The sensor exhibits a good linearity over the pressure range of 1.9–14.2 psi, with a sensitivity of 0.009 μm/psi and a hysteresis of 2.7%. This sensor is expected to impact many fronts that require reliable static pressure measurements of fluids.
Keywords: Fabry-Perot interferometers
Photolithography
Pressure measurement
Pressure sensors
Pressure transducers
Refractive index
Publisher: Optical Society of America
Journal: Optics letters 
ISSN: 0146-9592
EISSN: 1539-4794
DOI: 10.1364/OL.35.001701
Rights: © 2010 Optical Society of America. This paper was published in Optics Letters and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-10-1701. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
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