Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/5023
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dc.contributorDepartment of Applied Physics-
dc.creatorBae, H-
dc.creatorZhang, X-
dc.creatorLiu, H-
dc.creatorYu, M-
dc.date.accessioned2014-12-11T08:22:42Z-
dc.date.available2014-12-11T08:22:42Z-
dc.identifier.issn0146-9592-
dc.identifier.urihttp://hdl.handle.net/10397/5023-
dc.language.isoenen_US
dc.publisherOptical Society of Americaen_US
dc.rights© 2010 Optical Society of America. This paper was published in Optics Letters and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-10-1701. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.en_US
dc.subjectFabry-Perot interferometersen_US
dc.subjectPhotolithographyen_US
dc.subjectPressure measurementen_US
dc.subjectPressure sensorsen_US
dc.subjectPressure transducersen_US
dc.subjectRefractive indexen_US
dc.titleMiniature surface-mountable Fabry–Perot pressure sensor constructed with a 45° angled fiberen_US
dc.typeJournal/Magazine Articleen_US
dc.description.otherinformationAuthor name used in this publication: X. M. Zhangen_US
dc.identifier.spage1701-
dc.identifier.epage1703-
dc.identifier.volume35-
dc.identifier.issue10-
dc.identifier.doi10.1364/OL.35.001701-
dcterms.abstractWe present a surface-mountable miniature Fabry–Perot (FP) pressure sensor that utilizes the total internal reflection at a 45° angled fiber end face to steer the optical axis by 90°. By using the fiber as a waveguide, as well as a natural mask in photolithography, an FP cavity is constructed on the sidewall of the fiber. A polymer–metal composite diaphragm is employed as the pressure transducer. The sensor exhibits a good linearity over the pressure range of 1.9–14.2 psi, with a sensitivity of 0.009 μm/psi and a hysteresis of 2.7%. This sensor is expected to impact many fronts that require reliable static pressure measurements of fluids.-
dcterms.accessRightsopen accessen_US
dcterms.bibliographicCitationOptics letters, 15 May 2010, v. 35, no. 10, p. 1701-1703-
dcterms.isPartOfOptics letters-
dcterms.issued2010-05-15-
dc.identifier.isiWOS:000277773400070-
dc.identifier.scopus2-s2.0-77954949792-
dc.identifier.eissn1539-4794-
dc.identifier.rosgroupidr49228-
dc.description.ros2009-2010 > Academic research: refereed > Publication in refereed journal-
dc.description.oaVersion of Recorden_US
dc.identifier.FolderNumberOA_IR/PIRAen_US
dc.description.pubStatusPublisheden_US
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