Please use this identifier to cite or link to this item:
http://hdl.handle.net/10397/4344
Title: | ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications | Authors: | Yan, Z Zhou, XY Pang, GKH Zhang, T Liu, WL Cheng, JG Song, ZT Feng, SL Lai, LH Chen, JZ Wang, Y |
Issue Date: | 2-Apr-2007 | Source: | Applied physics letters, 2 Apr. 2007, v. 90, no. 14, 143503, p. 1-3 | Abstract: | Zinc oxide (ZnO)-based film bulk acoustic resonator consisting of a piezoelectric element (Au/ZnO/Pt) and a Bragg reflector (ZnO/Pt multilayer structure) has been fabricated by magnetron sputtering. The transmission electron microscopy and x-ray diffraction measurements revealed that all thin film layers in the device were well crystallized and highly textured. By electrical measurements, it was found that the device had a high resonant frequency (3.94 GHz) and mass sensitivity (8970 Hz cm²/ng). The use of the device as a biosensor was demonstrated by comparing the resonant properties of the device with/without coatings of biospecies. | Keywords: | Gold Platinum Zinc compounds II-VI semiconductors Wide band gap semiconductors Semiconductor thin films Sputtered coatings Multilayers Thin film sensors Acoustic resonators Bulk acoustic wave devices Biosensors Crystal resonators Semiconductor devices Transmission electron microscopy X-ray diffraction Texture |
Publisher: | American Institute of Physics | Journal: | Applied physics letters | ISSN: | 0003-6951 | EISSN: | 1077-3118 | DOI: | 10.1063/1.2719149 | Rights: | © 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Z. Yan et al., Appl. Phys. Lett. 90, 143503 (2007) and may be found at http://apl.aip.org/resource/1/applab/v90/i14/p143503_s1 |
Appears in Collections: | Journal/Magazine Article |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
Yan_ZnO-based_acoustic_resonator.pdf | 236.7 kB | Adobe PDF | View/Open |
Page views
145
Last Week
2
2
Last month
Citations as of Jun 4, 2023
Downloads
326
Citations as of Jun 4, 2023
SCOPUSTM
Citations
83
Last Week
0
0
Last month
0
0
Citations as of Jun 1, 2023
WEB OF SCIENCETM
Citations
74
Last Week
0
0
Last month
0
0
Citations as of Jun 1, 2023

Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.