Please use this identifier to cite or link to this item:
http://hdl.handle.net/10397/4217
| Title: | Selective growth of (100)-, (110)-, and (111)-oriented MgO films on Si(100) by pulsed laser deposition | Authors: | Chen, XY Wong, KH Mak, CL Yin, XB Wang, M Liu, JM Liu, Z |
Issue Date: | 1-May-2002 | Source: | Journal of applied physics, 1 May 2002, v. 91, no. 9, p. 5728-5734 | Abstract: | Selective growth of singly oriented (110)-, (100)-, and (111)-MgO films on Si(100)substrates were obtained by pulsed laser deposition. The effects of deposition temperature, ambient oxygen pressure, and etching of the substrate on the structural properties of the films were studied. It is found that the crystalline orientations of the MgO films are determined at the initial deposition stage by the substrate temperature only. The ambient pressure during deposition and etching of the Si substrates only effect the crystalline quality. Both (110)- and (111)-oriented films show granular grain structures. The (100)-oriented films grown on etched Si substrates display similar granular structures. Those deposited on nonetched Si substrates, however, reveal distinctive columnar grains. The observed phenomena are discussed based on the theory of crystal growth. The mechanism of the orientation selection is attributed to the energy balance between the surface and the interface energies. The varied grain structures are explained by considering the mobility of adatoms in different situations. | Keywords: | Magnesium compounds Insulating thin films Pulsed laser deposition Crystal microstructure Etching |
Publisher: | American Institute of Physics | Journal: | Journal of applied physics | ISSN: | 0021-8979 | EISSN: | 1089-7550 | DOI: | 10.1063/1.1461059 | Rights: | © 2002 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in X. Y. Chen et al., J. Appl. Phys. 91, 5728 (2002) and may be found at http://link.aip.org/link/?jap/91/5728. |
| Appears in Collections: | Journal/Magazine Article |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Chen_Selective_growth_oriented.pdf | 402.39 kB | Adobe PDF | View/Open |
Access
View full-text via PolyU eLinks 
Page views
102
Last Week
3
3
Last month
Citations as of May 28, 2023
Downloads
213
Citations as of May 28, 2023
SCOPUSTM
Citations
49
Last Week
0
0
Last month
0
0
Citations as of May 25, 2023
WEB OF SCIENCETM
Citations
41
Last Week
0
0
Last month
0
0
Citations as of May 25, 2023
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.