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Title: One-step generation of hybrid micro-optics with high-frequency diffractive structures on infrared materials by ultra-precision side milling
Authors: Sun, ZW 
To, S 
Yu, KM 
Issue Date: 2018
Publisher: Optical Society of America
Source: Optics express, Oct. 2018, v. 26, no. 21, p. 28161-28177 How to cite?
Journal: Optics expressonline only 
Abstract: Hybrid micro-optics of infrared (IR) materials are of great advantage in realizing the function integration and minimization of advanced IR optical systems. However, due to the hard-and-brittle nature of IR materials, it is still challenging for both non-mechanical and mechanical technologies to achieve one-step generation of hybrid infrared micro-optics with high form accuracy. In the present study, a flexible method, namely ultra-precision side milling (UPSM), is first introduced to achieve one-step generation of infrared hybrid micro-optics in ductile mode, and the corresponding reflective diffraction characteristics are analyzed. In UPSM, the reflective/refractive primary surface of the hybrid micro-optics is formed via the removal of workpiece material, and the high-frequent secondary diffractive micro/nanostructures are simultaneously generated by the tool residual marks of cutting trajectories. With the consideration of the changing curvature of the primary surface, the optimal toolpath generation strategy is introduced to acquire the desired shapes of the secondary micro/nanostructures, and the selecting criteria of the machining parameters is discussed to avoid the brittle fractures of IR materials. In practice, two types of hybrid micro-optic components, namely hybrid micro-aspheric arrays and sinusoid grid surface with high-frequent secondary unidirectional phase gratings, are successfully fabricated on single-crystal silicon to validate the proposed method. The method adopted in this study is very promising for the deterministic fabrication of hybrid micro-optics on infrared materials.
EISSN: 1094-4087
DOI: 10.1364/OE.26.028161
Rights: © 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement (
© 2018 Optical Society of America. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved.
Journal © 2018
The following publication Sun, Z.W., To, S., & Yu, K.M. (2018). One-step generation of hybrid micro-optics with high-frequency diffractive structures on infrared materials by ultra-precision side milling. Optics express, 26 (21), 28161-28177 is available at
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