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Title: Ellipsometric spectra and growth of MgO thin films by pulsed laser deposition
Other Titles: 椭偏光谱法研究激光脉冲沉积 MgO 薄膜材料生长
Authors: Zhang, YL
Mo, D
Chen, XY
Mak, CL 
Wong, KH
Choy, CL 
Keywords: MgO thin film
Ellipsometric spectra
Optical constants
Issue Date: 2003
Publisher: 中山大學
Source: 中山大學學報. 自然科學版 ( Acta scientiarum naturalium Universitatis Sunyatseni), 2003, v. 42, no. 2, p. 18-22 How to cite?
Journal: 中山大學學報. 自然科學版 ( Acta scientiarum naturalium Universitatis Sunyatseni) 
Abstract: MgO thin films deposited on si(100) substrate have been prepared by pulsed laser deposition (PLD) at different conditions. The ellipsometric spectra of the MgO films have been obtained in the spectral range of 300~800 nm, and their optical constants and thickness are determined from the ellipsometric spectra. The optical constants and thickness of MgO films can be affected by the growth condition,and the results show that the higher vacuum, the higher substrate’s temperature and suitable laser energy is good for getting higher refractive index, higher density and good quality MgO thin films.
ISSN: 0529-6579
Rights: © 2003 中国学术期刊电子杂志出版社。本内容的使用仅限于教育、科研之目的。
© 2003 China Academic Journal Electronic Publishing House. It is to be used strictly for educational and research use.
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