Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/63893
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dc.contributorDepartment of Applied Physics-
dc.creatorZhang, YL-
dc.creatorMo, D-
dc.creatorChen, XY-
dc.creatorMak, CL-
dc.creatorWong, KH-
dc.creatorChoy, CL-
dc.date.accessioned2017-02-09T08:32:18Z-
dc.date.available2017-02-09T08:32:18Z-
dc.identifier.issn0529-6579-
dc.identifier.urihttp://hdl.handle.net/10397/63893-
dc.language.isozhen_US
dc.publisher中山大學en_US
dc.rights© 2003 中国学术期刊电子杂志出版社。本内容的使用仅限于教育、科研之目的。en_US
dc.rights© 2003 China Academic Journal Electronic Publishing House. It is to be used strictly for educational and research use.en_US
dc.subjectMgO thin filmen_US
dc.subjectPLDen_US
dc.subjectEllipsometric spectraen_US
dc.subjectOptical constantsen_US
dc.titleEllipsometric spectra and growth of MgO thin films by pulsed laser depositionen_US
dc.typeJournal/Magazine Articleen_US
dc.identifier.spage18-
dc.identifier.epage22-
dc.identifier.volume42-
dc.identifier.issue2-
dcterms.abstractMgO thin films deposited on si(100) substrate have been prepared by pulsed laser deposition (PLD) at different conditions. The ellipsometric spectra of the MgO films have been obtained in the spectral range of 300~800 nm, and their optical constants and thickness are determined from the ellipsometric spectra. The optical constants and thickness of MgO films can be affected by the growth condition,and the results show that the higher vacuum, the higher substrate’s temperature and suitable laser energy is good for getting higher refractive index, higher density and good quality MgO thin films.-
dcterms.accessRightsopen accessen_US
dcterms.alternative椭偏光谱法研究激光脉冲沉积 MgO 薄膜材料生长-
dcterms.bibliographicCitation中山大學學報. 自然科學版 ( Acta scientiarum naturalium Universitatis Sunyatseni), 2003, v. 42, no. 2, p. 18-22-
dcterms.isPartOf中山大學學報. 自然科學版 ( Acta scientiarum naturalium Universitatis Sunyatseni)-
dcterms.issued2003-
dc.identifier.rosgroupidr14836-
dc.description.ros2002-2003 > Academic research: refereed > Publication in refereed journal-
dc.description.oaVersion of Recorden_US
dc.identifier.FolderNumberOA_IR/PIRAen_US
dc.description.pubStatusPublisheden_US
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