Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/63764
Title: Design of double-beam interferometer for detecting piezoelectric strain of thin film
Other Titles: 檢測薄膜壓電形變的雙光束探測干涉儀的設計
Authors: Huang, A
Shi, BX
Chan, HLW 
Keywords: Double beam interferometers
Piezoelectric effects
Bending effects
Thin film measurement
Issue Date: 2002
Publisher: 中國學術期刊 (光盤版) 電子雜誌社
Source: 光電工程 (Opto-electronic engineering), 2002, v. 29, no. 5, p. 45-48 How to cite?
Journal: 光電工程 (Opto-electronic engineering) 
Abstract: In order to measure micro-strain of piezoelectric thin film under action of electric field and avoiding the impact of substrate bending effect, a double-beam interferometer is designed. The objective of high stability and high resolution is achieved through feedback control and phase-locking detection technique. The minimum detectable strain is as small as 0.001nm. With measurement and data processing are controlled by a computer, the system has the advantages of convenience, fast measurement speed and high accuracy.
URI: http://hdl.handle.net/10397/63764
ISSN: 1003-501X
Rights: © 2002 中国学术期刊电子杂志出版社。本内容的使用仅限于教育、科研之目的。
© 2002 China Academic Journal Electronic Publishing House. It is to be used strictly for educational and research purposes.
Appears in Collections:Journal/Magazine Article

Files in This Item:
File Description SizeFormat 
r12430.pdf109.06 kBAdobe PDFView/Open
Access
View full-text via PolyU eLinks SFX Query
Show full item record
PIRA download icon_1.1View/Download Contents

Page view(s)

34
Last Week
0
Last month
Citations as of Jul 10, 2018

Download(s)

50
Citations as of Jul 10, 2018

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.