Please use this identifier to cite or link to this item:
http://hdl.handle.net/10397/63764
| DC Field | Value | Language |
|---|---|---|
| dc.contributor | Department of Applied Physics | - |
| dc.creator | Huang, A | - |
| dc.creator | Shi, BX | - |
| dc.creator | Chan, HLW | - |
| dc.date.accessioned | 2017-02-09T08:30:32Z | - |
| dc.date.available | 2017-02-09T08:30:32Z | - |
| dc.identifier.issn | 1003-501X | - |
| dc.identifier.uri | http://hdl.handle.net/10397/63764 | - |
| dc.language.iso | zh | en_US |
| dc.publisher | 中國學術期刊 (光盤版) 電子雜誌社 | en_US |
| dc.rights | © 2002 中国学术期刊电子杂志出版社。本内容的使用仅限于教育、科研之目的。 | en_US |
| dc.rights | © 2002 China Academic Journal Electronic Publishing House. It is to be used strictly for educational and research purposes. | en_US |
| dc.subject | Double beam interferometers | en_US |
| dc.subject | Piezoelectric effects | en_US |
| dc.subject | Bending effects | en_US |
| dc.subject | Thin film measurement | en_US |
| dc.title | Design of double-beam interferometer for detecting piezoelectric strain of thin film | en_US |
| dc.type | Journal/Magazine Article | en_US |
| dc.identifier.spage | 45 | - |
| dc.identifier.epage | 48 | - |
| dc.identifier.volume | 29 | - |
| dc.identifier.issue | 5 | - |
| dcterms.abstract | In order to measure micro-strain of piezoelectric thin film under action of electric field and avoiding the impact of substrate bending effect, a double-beam interferometer is designed. The objective of high stability and high resolution is achieved through feedback control and phase-locking detection technique. The minimum detectable strain is as small as 0.001nm. With measurement and data processing are controlled by a computer, the system has the advantages of convenience, fast measurement speed and high accuracy. | - |
| dcterms.accessRights | open access | en_US |
| dcterms.alternative | 檢測薄膜壓電形變的雙光束探測干涉儀的設計 | - |
| dcterms.bibliographicCitation | 光電工程 (Opto-electronic engineering), 2002, v. 29, no. 5, p. 45-48 | - |
| dcterms.isPartOf | 光電工程 (Opto-electronic engineering) | - |
| dcterms.issued | 2002 | - |
| dc.identifier.rosgroupid | r12430 | - |
| dc.description.ros | 2002-2003 > Academic research: refereed > Publication in refereed journal | - |
| dc.description.oa | Version of Record | en_US |
| dc.identifier.FolderNumber | OA_IR/PIRA | en_US |
| dc.description.pubStatus | Published | en_US |
| Appears in Collections: | Journal/Magazine Article | |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| r12430.pdf | 109.06 kB | Adobe PDF | View/Open |
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