Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/4881
Title: Improvement of laser molecular beam epitaxy grown SrTiO₃ thin film properties by temperature gradient modulation growth
Authors: Li, JL
Hao, JH 
Li, YR
Keywords: Diffusion
Ferroelectric thin films
Interface phenomena
Laser materials processing
Molecular beam epitaxial growth
Reflection high energy electron diffraction
Strontium compounds
X-ray diffraction
Issue Date: 24-Sep-2007
Publisher: American Institute of Physics
Source: Applied physics letters, 24 Sept. 2007, v. 91, no. 13, 131902, p. 1-3 How to cite?
Journal: Applied physics letters 
Abstract: Oxygen diffusion at the SrTiO₃/Si interface was analyzed. A method called temperature gradient modulation growth was introduced to control oxygen diffusion at the interface of SrTiO₃/Si. Nanoscale multilayers were grown at different temperatures at the initial growing stage of films. Continuous growth of SrTiO₃ films was followed to deposit on the grown sacrificial layers. The interface and crystallinity of SrTiO₃/Si were investigated by in situ reflection high energy electron diffraction and x-ray diffraction measurements. It has been shown that the modulated multilayers may help suppress the interfacial diffusion, and therefore improve SrTiO₃ thin film properties.
URI: http://hdl.handle.net/10397/4881
ISSN: 0003-6951
EISSN: 1077-3118
DOI: 10.1063/1.2790074
Rights: © 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in J. L. Li, J. H. Hao & Y. R. Li, Appl. Phys. Lett. 91, 131902 (2007) and may be found at http://link.aip.org/link/?apl/91/131902
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