Strain distribution in epitaxial SrTiO₃thin films

Abstract

The lattice strain distributions of epitaxial SrTiO₃films deposited on LaAlO₃ were investigated by in situ x-ray diffraction at the temperature range of 25–300 K, grazing incident x-ray diffraction, and high resolution x-ray diffraction. The nearly linear temperature dependence of the out-of-plane lattice constant of SrTiO₃was observed in the measured temperature range. The depth distribution of the lattice strain at room temperature for SrTiO₃films includes the surface layer, strained layer, and interface layer.