Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/458
Title: Piezoelectric coefficient of aluminum nitride and gallium nitride
Authors: Lueng, CM
Chan, HLW 
Surya, C 
Choy, CL
Keywords: Aluminium compounds
Gallium compounds
III-V semiconductors
Piezoelectric materials
Piezoelectric thin films
Wide band gap semiconductors
Epitaxial layers
X-ray diffraction
Permittivity
Electrical resistivity
Issue Date: 1-Nov-2000
Publisher: American Institute of Physics
Source: Journal of applied physics, 1 Nov. 2000, v. 88, no. 9, p.5360-5363 How to cite?
Journal: Journal of applied physics 
Abstract: The piezoelectric coefficient d₃₃ of aluminum nitride (AlN) and gallium nitride (GaN) thin films grown on silicon substrates by molecular beam epitaxy have been measured using a laser interferometer. X-ray diffraction reveals that the AlN and GaN films consist mainly of crystals with a hexagonal wurtzite structure. In order to grow epitaxial GaN films, an AlN film was first deposited on silicon as the buffer layer, so the d₃₃ measurement for GaN was actually performed on GaN/AlN/Si multilayer systems. The relative permittivity and electrical resistivity of each constituent layer of the film and the potential drop across each layer were determined as a function of frequency. The potential drops were then used to calculate the piezoelectric coefficient d₃₃ of GaN. After correcting for substrate clamping, d₃₃ of AlN and GaN were found to be (5.1±0.1) and (3.1±0.1) pm Vˉ¹, respectively.
URI: http://hdl.handle.net/10397/458
ISSN: 0021-8979
Rights: © 2000 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in C.M. Lueng et al. J. Appl. Phys. 88, 5360 (2000) and may be found at http://link.aip.org/link/?jap/88/5360
Appears in Collections:Journal/Magazine Article

Files in This Item:
File Description SizeFormat 
aluminum-gallium_00.pdf371.13 kBAdobe PDFView/Open
Access
View full-text via PolyU eLinks SFX Query
Show full item record

SCOPUSTM   
Citations

53
Citations as of Dec 16, 2015

WEB OF SCIENCETM
Citations

49
Last Week
0
Last month
0
Citations as of Sep 26, 2016

Page view(s)

540
Last Week
2
Last month
Checked on Sep 25, 2016

Download(s)

3,160
Checked on Sep 25, 2016

Google ScholarTM

Check



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.