Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/430
Title: Study of interfacial reaction and its impact on electric properties of Hf-Al-O high-k gate dielectric thin films grown on Si
Authors: Lee, PF
Dai, J 
Wong, KH
Chan, HLW 
Choy, CL 
Issue Date: 14-Apr-2003
Source: Applied physics letters, 14 Apr. 2003, v. 82, no. 15, p.2419-2421
Abstract: Amorphous thin films of Hf-Al-O (with atomic ratio of Al/Hf of about 1.4) were deposited on (100) p-Si substrates by pulsed-laser deposition using a HfO₂ and Al₂O₃ composite target. Transmission electron microscopy was employed for a detailed study of the interfacial reaction between the Hf-Al-O films and the Si substrates. Islands of Hf silicide formed from interfacial reaction were observed on the surface of the Si substrate. The formation of Hf silicide is attributed to the presence of Al oxide in the films that triggers the reaction between Hf atoms in the amorphous Hf-Al-O films and Si under an oxygen deficient condition. The impact of silicide formation on the electrical properties was revealed by high-frequency capacitance-voltage (C-V) measurements on metal-oxide-semiconductor capacitors. The observed abnormal C-V curve due to interfacial reaction was discussed.
Keywords: Dielectric thin films
Pulsed laser deposition,
MOS capacitors
Hafnium compounds
Aluminium compounds
Transmission electron
Microscopy
Publisher: American Institute of Physics
Journal: Applied physics letters 
ISSN: 0003-6951
EISSN: 1077-3118
Rights: © 2003 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in P. F. Lee et al. Appl. Phys. Lett. 82, 2419 (2003) and may be found at http://link.aip.org/link/?apl/82/2419
Appears in Collections:Journal/Magazine Article

Files in This Item:
File Description SizeFormat 
interfacial_reaction_03.pdf226.35 kBAdobe PDFView/Open
Access
View full-text via PolyU eLinks SFX Query
Show full item record
PIRA download icon_1.1View/Download Full Text

SCOPUSTM   
Citations

35
Last Week
0
Last month
0
Citations as of Aug 21, 2020

WEB OF SCIENCETM
Citations

32
Last Week
0
Last month
0
Citations as of Sep 12, 2020

Page view(s)

1,314
Last Week
0
Last month
Citations as of Sep 13, 2020

Download(s)

795
Citations as of Sep 13, 2020

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.