Please use this identifier to cite or link to this item:
http://hdl.handle.net/10397/94533
Title: | Design and analysis of new ultra compact decoupled XYZθ stage to achieve large-scale high precision motion | Authors: | Chen, X Li, Y Xie, Y Wang, R |
Issue Date: | Jan-2022 | Source: | Mechanism and machine theory, Jan. 2022, v. 167, 104527 | Abstract: | A new high precision ultra-compact decoupled XYZθ motion stage based on flexure hinges is designed and analyzed. The stage mainly consists of three components including serial–parallel dual-stage amplifier, Z-shape motion steering mechanism and motion decoupled mechanism. Compared with the existing stages, the proposed high precision motion stage has many advantages such as extremely compact structure, large output decoupling motion and XYZθ four axes output displacement. The function of serial–parallel dual-stage amplifier is to amplify the travel range of nano positioning piezo actuator (PZT) by connecting two parallel bridge type mechanism. The Z-shape mechanism can change the direction of motion transmission to make the stage more compact and form movement in XYZθ four directions. The decouple mechanism can reduce the implicative movement of different piezo actuators. Then, kinetostatic analysis of this new XYZθ stage is conducted to analyze the stage. Finally, the finite-element analysis (FEA) and prototype experiments are implemented to verify the design objectives. | Keywords: | Decoupled XYZθ stage Flexure mechanism design Large-scale high precision motion Two-stage amplifier Ultra compact structure |
Publisher: | Pergamon Press | Journal: | Mechanism and machine theory | ISSN: | 0094-114X | DOI: | 10.1016/j.mechmachtheory.2021.104527 | Rights: | © 2021 Elsevier Ltd. All rights reserved. © 2021. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/. The following publication Chen, X., Li, Y., Xie, Y., & Wang, R. (2022). Design and analysis of new ultra compact decoupled XYZθ stage to achieve large-scale high precision motion. Mechanism and Machine Theory, 167, 104527 is available at https://dx.doi.org/10.1016/j.mechmachtheory.2021.104527. |
Appears in Collections: | Journal/Magazine Article |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
Chen_Design_Analysis_New.pdf | Pre-Published version | 9.28 MB | Adobe PDF | View/Open |
Page views
42
Last Week
0
0
Last month
Citations as of Oct 13, 2024
Downloads
34
Citations as of Oct 13, 2024
SCOPUSTM
Citations
21
Citations as of Oct 17, 2024
WEB OF SCIENCETM
Citations
14
Citations as of Oct 17, 2024
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.