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Title: Development of a two-degree-of-freedom vibration generator for fabricating optical microstructure arrays
Authors: Du, H 
Yip, W 
Zhu, Z
To, S 
Issue Date: Aug-2021
Source: Optics express, 2 Aug. 2021, v. 29, no. 16, p. 25903-25921
Abstract: Optical microstructure arrays on metallic surfaces are drawing ever-increasing attention due to the increasing requirements in optical systems. Although vibration generators are developed for generating optical microarrays with the ultra-precision diamond cutting process, the systematic research works on its mechanical design, working performance simulation, and numerical simulation of microstructure arrays has received less attention. In this study, a novel two-degree-of-freedom vibration generator (2DOF-VG) is designed based on the triangular amplification mechanism. To precisely simulate the working performance of this designed 2DOF-VG, the detailed multi-physics finite element method is proposed. Considering the threedimensional geometric shape of the cutting tool, the cutting motion trajectory, and the elastic recovery of the workpiece material, the numerical simulation algorithm of the microstructure arrays generation is then established and used to precisely predict the surface topography of microstructure arrays. Finally, two types of unique microstructure arrays are fabricated, which demonstrates the feasibility and flexibility of the 2DOF-VG.
Publisher: Optical Society of America
Journal: Optics express 
EISSN: 1094-4087
DOI: 10.1364/OE.433720
Rights: © 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement (
Journal © 2021
© 2021 Optica Publishing Group. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved.
The following publication Du, H., Yip, W., Zhu, Z., & To, S. (2021). Development of a two-degree-of-freedom vibration generator for fabricating optical microstructure arrays. Optics Express, 29(16), 25903-25921 is available at
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