Model-based self-optimization method for form correction in the computer controlled bonnet polishing of optical freeform surfaces

Abstract

Freeform surfaces have become increasingly widespread in the optical systems for enhanced performance and compact lightweight packaging. The geometrical complexity and high precision requirements of optical freeform surfaces for various functional optical applications, has posed great challenges in the design, precision machining, and measurement of these surfaces. This paper presents a model-based self-optimization approach for precision machining and measurement of optical freeform surfaces in the computer controlled bonnet polishing (CCBP) process. To realize the technical feasibility, the process parameters and motion control are accurately performed through modelling and simulation of machining processes, error compensation, and on-machine metrology.