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Title: Theoretical analysis of an optical accelerometer based on resonant optical tunneling effect
Authors: Jian, AQ
Wei, CG
Guo, LF
Hu, J
Tang, J
Liu, J
Zhang, XM 
Sang, SB
Issue Date: 2017
Source: Sensors, Feb. 2017, v. 17, no. 2, 389, p. 1-12
Abstract: Acceleration is a significant parameter for monitoring the status of a given objects. This paper presents a novel linear acceleration sensor that functions via a unique physical mechanism, the resonant optical tunneling effect (ROTE). The accelerometer consists of a fixed frame, two elastic cantilevers, and a major cylindrical mass comprised of a resonant cavity that is separated by two air tunneling gaps in the middle. The performance of the proposed sensor was analyzed with a simplified mathematical model, and simulated using finite element modeling. The simulation results showed that the optical Q factor and the sensitivity of the accelerometer reach up to 8.857 x 10(7) and 9 pm/g, respectively. The linear measurement range of the device is +/- 130 g. The work bandwidth obtained is located in 10- 500 Hz. The results of this study provide useful guidelines to improve measurement range and resolution of integrated optical acceleration sensors.
Keywords: Accelerometer
Finite element modeling
Publisher: Molecular Diversity Preservation International (MDPI)
Journal: Sensors 
ISSN: 1424-8220
DOI: 10.3390/s17020389
Rights: © 2017 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (
The following publication Jian, A. Q., Wei, C. G., Guo, L. F., Hu, J., Tang, J., Liu, J., … Sang, S. B. (2017). Theoretical analysis of an optical accelerometer based on resonant optical tunneling effect. Sensors, 17(2), (Suppl. ), 389, - is available at
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