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Title: Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
Authors: Cheng, CH 
Chao, C
Issue Date: 10-Sep-2013
Source: US Patent 8,531,919 B2. Washington, DC: US Patent and Trademark Office, 2013.
Abstract: A Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased.
Rights: Assignee: The Hong Kong Polytechnic University.
Appears in Collections:Patent

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