Please use this identifier to cite or link to this item:
http://hdl.handle.net/10397/6296
| Title: | Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance | Authors: | Cheng, CH Chao, C |
Issue Date: | 10-Sep-2013 | Source: | US Patent 8,531,919 B2. Washington, DC: US Patent and Trademark Office, 2013. | Abstract: | A Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased. | Rights: | Assignee: The Hong Kong Polytechnic University. |
| Appears in Collections: | Patent |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| us8531919b2.pdf | 1.12 MB | Adobe PDF | View/Open |
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