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dc.contributorDepartment of Industrial and Systems Engineering-
dc.contributorResearch Institute of Innovative Products and Technologies-
dc.creatorCheng, CH-
dc.creatorChao, C-
dc.rightsAssignee: The Hong Kong Polytechnic University.en_US
dc.titleFlexible capacitive micromachined ultrasonic transducer array with increased effective capacitanceen_US
dc.description.otherinformationUS8531919; US8531919 B2; US8531919B2; US8,531,919; US 8,531,919 B2; 8531919; Appl. No. 12/885,798en_US
dcterms.abstractA Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased.-
dcterms.bibliographicCitationUS Patent 8,531,919 B2. Washington, DC: US Patent and Trademark Office, 2013.-
dc.description.oaVersion of Recorden_US
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