Island, pit, and groove formation in strained heteroepitaxy

Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/4855

Title:	Island, pit, and groove formation in strained heteroepitaxy
Authors:	Lung, MT Lam, CH Sander, LM
Issue Date:	19-Aug-2005
Source:	Physical review letters, 19 Aug. 2005, v. 95, no. 8, 086102, p. 1-4
Abstract:	We study the morphological evolution of strained heteroepitaxial films using a kinetic Monte Carlo method in three dimensions. The elastic part of the problem uses a Green’s function method. Isolated islands are observed under deposition conditions for deposition rates slow compared with intrinsic surface roughening rates. They are hemispherical and truncated conical for high and low temperature cases, respectively. Annealing of films at high temperature leads to the formation of closely packed islands as in instability theory. At low temperature, pits form via a multistep layer-by-layer nucleation mechanism in contrast to the conventional single-step nucleation process. They subsequently develop into grooves, which are energetically more favorable.
Keywords:	Deposition Elastic moduli Nucleation Surface roughness Thermal effects Thin films
Publisher:	American Physical Society
Journal:	Physical review letters
ISSN:	0031-9007
EISSN:	1079-7114
DOI:	10.1103/PhysRevLett.95.086102
Rights:	Physical Review Letters © 2005 The American Physical Society. The Journal's web site is located at http://prl.aps.org/
Appears in Collections:	Journal/Magazine Article

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