Piezoelectric micromachined ultrasonic transducers based on P(VDF-TrFE) copolymer thin films

Abstract

Representing a new approach to ultrasound generation and detection, study on piezoelectric micromachined ultrasonic transducers (pMUTs) has been a growing research area in recent years. Intensive research work has been directed on the deposition of lead zirconate titanate (PZT) films on silicon substrates for their excellent piezoelectric coefficients and electromechanical coupling coefficients. However, the high processing temperature required for PZT crystallization results in a low device yield and also makes it difficult to integrate with control circuits. In this paper, a fabrication technology of pMUTs based on piezoelectric P(VDF-TrFE) 70/30 copolymer films has been adopted, with the maximum processing temperature not exceeding 140°C allowing for post-IC compatibility. The entire processing procedures are simple and low cost, as compared with those of capacitive micromachined ultrasonic transducers (cMUTs) and ceramic-based pMUTs. The applications of the fabricated pMUTs as airborne ultrasonic transducers and transducer arrays have been demonstrated. Reasonably good device performances and high device yield have been achieved.