Please use this identifier to cite or link to this item:
http://hdl.handle.net/10397/4342
| Title: | Copper thin film of alternating textures | Authors: | Huang, H Wei, HL Woo, CH Zhang, XX |
Issue Date: | 16-Jun-2003 | Source: | Applied physics letters, 16 June 2003, v. 82, no. 24, p. 4265-4267 | Abstract: | It is common for thin films to have a predominant texture, but not alternating textures. In this letter, we report a copper film of alternating textures through self-organization. Using dc magnetron sputtering technique, we deposit copper films on a SiO₂/Si(111) substrate. A thin layer of copper of 〈111〉 texture is first developed, and another thin layer of 〈110〉 ensued. As deposition continues, a third layer of copper of 〈111〉 texture is formed on the top, leading to a sandwich copper thin film of alternating 〈111〉 and 〈110〉 textures. The film morphology is characterized with scanning electron microscopy and atomic force microscopy and the texture with x-ray diffraction. Based on anisotropic elastic analyses and molecular dynamics simulations, we propose a model of texture evolution during the formation of multilayers, attributing the texture evolution to the competition of surface and strain energies. | Keywords: | Copper Metallic thin films Texture Self-assembly Sputter deposition Crystal morphology Scanning electron microscopy X-ray diffraction Atomic force microscopy Molecular dynamics method Surface energy |
Publisher: | American Institute of Physics | Journal: | Applied physics letters | ISSN: | 0003-6951 | EISSN: | 1077-3118 | DOI: | 10.1063/1.1583866 | Rights: | © 2003 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Hanchen Huang et al., Appl. Phys. Lett. 82, 4265 (2003) and may be found at http://apl.aip.org/resource/1/applab/v82/i24/p4265_s1 |
| Appears in Collections: | Journal/Magazine Article |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Huang_et_al_Copper_Thin_Film.pdf | 419.75 kB | Adobe PDF | View/Open |
Access
View full-text via PolyU eLinks 
Page views
89
Last Week
1
1
Last month
Citations as of Jun 4, 2023
Downloads
162
Citations as of Jun 4, 2023
SCOPUSTM
Citations
23
Last Week
0
0
Last month
0
0
Citations as of Jun 8, 2023
WEB OF SCIENCETM
Citations
19
Last Week
0
0
Last month
0
0
Citations as of Jun 8, 2023
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.