Nanoimprint lithography-assisted block copolymer self-assembly for hyperfine fabrication of magnetic patterns based on L1₀-FePt nanoparticles

Abstract

L10-FePt-type bit-patterned media has provided a promising alternative for ultrahigh-density magnetic recording systems in the current digital era, but rapid fabrication of magnetic patterns with hyperfine bit islands is still challenging, especially with the target for miniaturization and scalable production simultaneously. Herein, Fe,Pt-containing block copolymers were utilized as single-source precursors for solution-processable patterning and subsequent generation of the demanding magnetic FePt dots by in situ pyrolysis. High-throughput nanoimprint lithography was initially employed to fabricate the predefined bit cells precisely, and then the intrinsic self-assembly of phase-separated block copolymers further drove the formation of accurate bit islands. Benefiting from the synergistic effect of top-down lithographic approach and bottom-up self-assembly, the customizable patterns could be achieved for large-scale mass production in targeted areas, but high-density isolated dots could also be accurately aligned along the patterned features after subsequent self-assembly. This reliable strategy would provide a good avenue to precisely construct ultrahigh-density magnetic data storage devices.