Please use this identifier to cite or link to this item:
http://hdl.handle.net/10397/105401
DC Field | Value | Language |
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dc.contributor | Department of Industrial and Systems Engineering | - |
dc.creator | Zhong, B | - |
dc.creator | Wu, W | - |
dc.creator | Wang, J | - |
dc.creator | Zhou, L | - |
dc.creator | Hou, J | - |
dc.creator | Ji, B | - |
dc.creator | Deng, W | - |
dc.creator | Wei, Q | - |
dc.creator | Wang, C | - |
dc.creator | Xu, Q | - |
dc.date.accessioned | 2024-04-12T06:52:14Z | - |
dc.date.available | 2024-04-12T06:52:14Z | - |
dc.identifier.uri | http://hdl.handle.net/10397/105401 | - |
dc.language.iso | en | en_US |
dc.publisher | Molecular Diversity Preservation International (MDPI) | en_US |
dc.rights | © 2023 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). | en_US |
dc.rights | The following publication Zhong B, Wu W, Wang J, Zhou L, Hou J, Ji B, Deng W, Wei Q, Wang C, Xu Q. Process Chain for Ultra-Precision and High-Efficiency Manufacturing of Large-Aperture Silicon Carbide Aspheric Mirrors. Micromachines. 2023; 14(4):737 is available at https://doi.org/10.3390/mi14040737. | en_US |
dc.subject | Aspheric mirror | en_US |
dc.subject | Deterministic polishing | en_US |
dc.subject | Precision testing | en_US |
dc.subject | Silicon carbide | en_US |
dc.subject | Ultra-precision shaping | en_US |
dc.title | Process chain for ultra-precision and high-efficiency manufacturing of large-aperture silicon carbide aspheric mirrors | en_US |
dc.type | Journal/Magazine Article | en_US |
dc.identifier.volume | 14 | - |
dc.identifier.issue | 4 | - |
dc.identifier.doi | 10.3390/mi14040737 | - |
dcterms.abstract | A large-aperture silicon carbide (SiC) aspheric mirror has the advantages of being light weight and having a high specific stiffness, which is the key component of a space optical system. However, SiC has the characteristics of high hardness and multi-component, which makes it difficult to realize efficient, high-precision, and low-defect processing. To solve this problem, a novel process chain combining ultra-precision shaping based on parallel grinding, rapid polishing with central fluid supply, and magnetorheological finishing (MRF) is proposed in this paper. The key technologies include the passivation and life prediction of the wheel in SiC ultra-precision grinding (UPG), the generation and suppression mechanism of pit defects on the SiC surface, deterministic and ultra-smooth polishing by MRF, and compensation interference detection of the high-order aspheric surface by a computer-generated hologram (CGH). The verification experiment was conducted on a Ø460 mm SiC aspheric mirror, whose initial surface shape error was 4.15 μm in peak-to-valley (PV) and a root-mean-square roughness (Rq) of 44.56 nm. After conducting the proposed process chain, a surface error of RMS 7.42 nm and a Rq of 0.33 nm were successfully obtained. Moreover, the whole processing cycle is only about 216 h, which sheds light on the mass production of large-aperture silicon carbide aspheric mirrors. | - |
dcterms.accessRights | open access | en_US |
dcterms.bibliographicCitation | Micromachines, Apr. 2023, v. 14, no. 4, 737 | - |
dcterms.isPartOf | Micromachines | - |
dcterms.issued | 2023-04 | - |
dc.identifier.scopus | 2-s2.0-85156152037 | - |
dc.identifier.eissn | 2072-666X | - |
dc.identifier.artn | 737 | - |
dc.description.validate | 202403 bcvc | - |
dc.description.oa | Version of Record | en_US |
dc.identifier.FolderNumber | OA_Scopus/WOS | en_US |
dc.description.fundingSource | Others | en_US |
dc.description.fundingText | China Academy of Engineering Physics; Hong Kong Polytechnic University | en_US |
dc.description.pubStatus | Published | en_US |
dc.description.oaCategory | CC | en_US |
Appears in Collections: | Journal/Magazine Article |
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File | Description | Size | Format | |
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micromachines-14-00737.pdf | 17.18 MB | Adobe PDF | View/Open |
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