Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/100588
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dc.contributorDepartment of Electrical and Electronic Engineeringen_US
dc.creatorYao, Men_US
dc.creatorWu, Jen_US
dc.creatorZhang, APen_US
dc.creatorTam, HYen_US
dc.creatorWai, PKAen_US
dc.date.accessioned2023-08-11T03:10:49Z-
dc.date.available2023-08-11T03:10:49Z-
dc.identifier.issn1530-437Xen_US
dc.identifier.urihttp://hdl.handle.net/10397/100588-
dc.language.isoenen_US
dc.publisherInstitute of Electrical and Electronics Engineersen_US
dc.rights©2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.en_US
dc.rightsThe following publication M. Yao, J. Wu, A. P. Zhang, H. Tam and P. K. A. Wai, "Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices," in IEEE Sensors Journal, vol. 17, no. 22, pp. 7257-7261, 15 Nov. 2017 is available at https://doi.org/10.1109/JSEN.2017.2737551.en_US
dc.subject3D printed sensoren_US
dc.subjectOptical microfabricationen_US
dc.subjectSuspended-mirror deviceen_US
dc.titleOptically 3-D μ-printed ferrule-top polymer suspended-mirror devicesen_US
dc.typeJournal/Magazine Articleen_US
dc.identifier.spage7257en_US
dc.identifier.epage7261en_US
dc.identifier.volume17en_US
dc.identifier.issue22en_US
dc.identifier.doi10.1109/JSEN.2017.2737551en_US
dcterms.abstractWe present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.en_US
dcterms.accessRightsopen accessen_US
dcterms.bibliographicCitationIEEE sensors journal, 15 Nov. 2017, v. 17, no. 22, p. 7257-7261en_US
dcterms.isPartOfIEEE sensors journalen_US
dcterms.issued2017-11-15-
dc.identifier.scopus2-s2.0-85029009339-
dc.description.validate202307 bckwen_US
dc.description.oaAccepted Manuscripten_US
dc.identifier.FolderNumberEE-0455-
dc.description.fundingSourceOthersen_US
dc.description.fundingTextPolyU Strategic Development Special Project; PolyU General Research Funden_US
dc.description.pubStatusPublisheden_US
dc.identifier.OPUS6780103-
dc.description.oaCategoryGreen (AAM)en_US
Appears in Collections:Journal/Magazine Article
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