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Title: | Theoretical analysis of an optical accelerometer based on resonant optical tunneling effect | Authors: | Jian, AQ Wei, CG Guo, LF Hu, J Tang, J Liu, J Zhang, XM Sang, SB |
Issue Date: | 2017 | Source: | Sensors, Feb. 2017, v. 17, no. 2, 389, p. 1-12 | Abstract: | Acceleration is a significant parameter for monitoring the status of a given objects. This paper presents a novel linear acceleration sensor that functions via a unique physical mechanism, the resonant optical tunneling effect (ROTE). The accelerometer consists of a fixed frame, two elastic cantilevers, and a major cylindrical mass comprised of a resonant cavity that is separated by two air tunneling gaps in the middle. The performance of the proposed sensor was analyzed with a simplified mathematical model, and simulated using finite element modeling. The simulation results showed that the optical Q factor and the sensitivity of the accelerometer reach up to 8.857 x 10(7) and 9 pm/g, respectively. The linear measurement range of the device is +/- 130 g. The work bandwidth obtained is located in 10- 500 Hz. The results of this study provide useful guidelines to improve measurement range and resolution of integrated optical acceleration sensors. | Keywords: | Accelerometer ROTE Finite element modeling Sensitivity Bandwidth |
Publisher: | Molecular Diversity Preservation International (MDPI) | Journal: | Sensors | ISSN: | 1424-8220 | DOI: | 10.3390/s17020389 | Rights: | © 2017 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). The following publication Jian, A. Q., Wei, C. G., Guo, L. F., Hu, J., Tang, J., Liu, J., … Sang, S. B. (2017). Theoretical analysis of an optical accelerometer based on resonant optical tunneling effect. Sensors, 17(2), (Suppl. ), 389, - is available athttps://dx.doi.org/10.3390/s17020389 |
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