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http://hdl.handle.net/10397/94559
Title: | Design and control of a novel electromagnetic actuated 3-DoFs micropositioner | Authors: | Xiao, X Xi, R Li, Y Tang, Y Ding, B Ren, H Meng, MQH |
Issue Date: | Oct-2021 | Source: | Microsystem technologies, Oct. 2021, v. 27, no. 10, p. 3763-3772 | Abstract: | In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that the micropositioner possesses an excellent decoupling performance. Thus an independent control strategy is carried out for the motion control of the micropositioner. An RBF neural networks based adaptive backstepping terminal sliding mode controller is designed according to the nonlinearity characteristics of the actuator. Parameters of the system are identified with a genetic algorithm. Finally, the performances of the micropositioner and the developed control strategy are verified. Experimental results demonstrate that satisfactory performances can be achieved. | Publisher: | Springer | Journal: | Microsystem technologies | ISSN: | 0946-7076 | EISSN: | 1432-1858 | DOI: | 10.1007/s00542-020-05163-3 | Rights: | © The Author(s), under exclusive licence to Springer-Verlag GmbH, DE part of Springer Nature 2021 This version of the article has been accepted for publication, after peer review (when applicable) and is subject to Springer Nature’s AM terms of use(https://www.springernature.com/gp/open-research/policies/accepted-manuscript-terms), but is not the Version of Record and does not reflect post-acceptance improvements, or any corrections. The Version of Record is available online at: https://doi.org/10.1007/s00542-020-05163-3. |
Appears in Collections: | Journal/Magazine Article |
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Li_Design_Control_Novel.pdf | Pre-Published version | 2.42 MB | Adobe PDF | View/Open |
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