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http://hdl.handle.net/10397/92549
Title: | Fabrication of polymer optical waveguides by digital ultraviolet lithography | Authors: | Ding, Z Wang, H Li, T Ouyang, X Shi, Y Zhang, AP |
Issue Date: | Jan-2022 | Source: | Journal of lightwave technology, 1 Jan. 2022, v. 40, no. 1, p. 163-169 | Abstract: | We present the design, fabrication and characterization of polymer optical waveguides using a digital ultraviolet (UV) lithography. Grayscale optical exposure with a nonlinear compensation in quadratic form is applied to minimize the stitching loss of the transition zone between two adjacent subpatterns. Proximity effects in lithography process are compensated based on an exposure dose-map that is calculated under the approximation of scattered light pixel with a Gaussian distribution. The bending loss and propagation loss of the fabricated polymer waveguides are experimentally characterized to be around 0.1 dB/90°-bend and 0.238 dB/mm, respectively. Moreover, 1 × 2 multimode-interference power splitter, 1 × 2 Y-branch power splitter and microring resonator are demonstrated to show the feasibility of the lithography technology on rapid fabrication of waveguides. Such a UV lithography technology flexibly manipulates huge-number light pixels for all-digital grayscale and dynamic optical exposure and thus can enable the fabrication of novel optical waveguide-based devices and sensors, such as 2.5D waveguides for multimode crossing and polymer waveguide devices for biosensing. | Keywords: | Digital lithography Integrated optics Polymer optical waveguides Proximity effects |
Publisher: | Institute of Electrical and Electronics Engineers | Journal: | Journal of lightwave technology | ISSN: | 0733-8724 | EISSN: | 1558-2213 | DOI: | 10.1109/JLT.2021.3120712 | Rights: | © 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The following publication Z. Ding, H. Wang, T. Li, X. Ouyang, Y. Shi and A. P. Zhang, "Fabrication of Polymer Optical Waveguides by Digital Ultraviolet Lithography," in Journal of Lightwave Technology, vol. 40, no. 1, pp. 163-169, Jan.1, 2022 is available at https://dx.doi.org/10.1109/JLT.2021.3120712. |
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Fabrication_of_polymer_optical_wavguides_-_AZhang.pdf | Pre-Published version | 6.09 MB | Adobe PDF | View/Open |
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