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Title: | Measurement of the electric-optic index of thin films by using modulated ellipsometry | Other Title: | 利用调制式椭偏仪测量薄膜电光系数 | Authors: | Li, F Wang, J Wang, DY Mo, D Chen, WLH |
Issue Date: | Feb-2005 | Source: | 紅外與毫米波學報 (Journal of infrared and millimeter waves), Feb. 2005, v. 24, no. 1, p. 31-33 | Abstract: | The electro-optic index of PLZT thin films was measured by means of modulated ellipsometry. First the refractive index (n) and thickness ( d) were measured by reflecting ellipsometry method. Then the electric field was applied on the film, and the change of refraction (deltan) by was obtained by transmission ellipsometry method. Finally, the electro-optic index was calculated by the data of n, d, E and deltan. This instrument has high sensitivity. So it is suitable to measure the electro-optical property of the thin film. 利用调制式的椭偏仪测量了掺镧锆钛酸铅PLZT薄膜的电光系数.首先用反射椭偏测量的方法得到薄膜的折射率(n)和厚度(d),然后利用透射椭偏在线测量的功能,在样品上加电场(E),得到薄膜的折射率的改变δn. 最后用测量得到的厚度,折射率以及折射率的改变来计算薄膜的电光系数.该仪器的灵敏度很高,很适合较薄的膜层材料电光性质的测量. |
Keywords: | Electro-optic index Ellipsometer PLZT thin films Optical properties |
Publisher: | 中國學術期刊 (光盤版) 電子雜誌社 | Journal: | 紅外與毫米波學報 (Journal of infrared and millimeter waves) | ISSN: | 1001-9014 | Rights: | © 2005 China Academic Journal Electronic Publishing House. It is to be used strictly for educational and research use. © 2005 中国学术期刊电子杂志出版社。本内容的使用仅限于教育、科研之目的。 |
Appears in Collections: | Journal/Magazine Article |
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