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Title: Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation
Authors: Wu, Z
Li, Y 
Hu, M
Issue Date: 2018
Publisher: Copernicus
Source: Mechanical sciences, 2018, v. 9, no. 2, p. 417-429 How to cite?
Journal: Mechanical sciences 
Abstract: Nano-positioning is widely used in Micro-electromechanical Systems (MEMS), micromanipulator and biomedicine, coupling errors and tiny output displacements are the main disadvantages of the one. A totally uncoupled micro/nano-positioning stage with lever amplifiers is designed and tested in this paper. It is fully symmetrical along with the x- and y-directions. For obtaining large output displacements, two fully symmetric two-stage lever displacement amplifiers are utilized to amplify output displacements of piezoelectric actuators (PZTs). The established models for performances evaluation of the stage, in terms of kinetostatics, amplification ratio, reachable workspace, the input and output stiffness, are verified by finite element analysis (FEA). After that, the dimensional optimization is also carried out through the genetic optimization algorithm.The prototype of the mechanism is fabricated by using Wire-Electrical-Discharge-Machining (WEDM) process. Testing results indicate that the proposed micromanipulator demonstrates good performance.
ISSN: 2191-9151
EISSN: 2191-916X
DOI: 10.5194/ms-9-417-2018
Rights: © Author(s) 2018. This work is distributed under the Creative Commons Attribution 4.0 License.
The following publication Wu, Z., Li, Y., and Hu, M.: Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation, Mech. Sci., 9, 417-429 is available at, 2018.
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