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Title: Palladium-based hydrogen sensor with adjustable connectivity prepared on substrate with controllable flexibility and production method
Other Titles: 制备于柔度可控基底上的连通性可调的钯基氢气传感器及其制作方法
Authors: Wong, CW 
Zhao, M 
Issue Date: 12-Apr-2017
Source: 中国专利 ZL 201210161122.X How to cite?
Abstract: The invention discloses a palladium-based hydrogen sensor with adjustable connectivity prepared on a substrate with controllable flexibility and a production method. The hydrogen sensor comprises a substrate (101), a vertical pillar (111), with material, number, shape, distribution position and gap size being adjustable, etched or deposited on the substrate (101) to adjust the flexibility of the substrate (101), and a palladium-based coating (104), with adjustable connectivity, deposited at the top of the vertical pillar (111) and being subjected to volume expansion and changing connectivity after absorption of hydrogen. With combination of the palladium-based coating with adjustable connectivity and the substrate with controllable flexibility, the hydrogen sensor is advantageous in that the hydrogen detection sensitivity of the sensor and the hydrogen concentration detection scope are adjustable; the sensitivity is high and the response rate is fast; the shear stress of the palladium-based coating can be eliminated through the bending of the vertical pillar on the substrate, and the sensor can have high stability; the sensor is suitable for batch production.
Rights: Assignee: The Hong Kong Polytechnic University
Appears in Collections:Patent

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