Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/4525
Title: Engineering kinetic barriers in copper metallization
Authors: Huang, H
Wei, HL
Woo, CH
Zhang, XX
Keywords: Copper
Integrated circuit metallisation
Sputtered coatings
Diffusion barriers
Scanning electron microscopy
X-ray diffraction
Surfactants
Issue Date: 2-Dec-2002
Publisher: American Institute of Physics
Source: Applied physics letters, 2 Dec. 2002, v. 81, no. 23, 4359, p. 1-3 How to cite?
Journal: Applied physics letters 
Abstract: In metallization processes of integrated circuits, it is desirable to deposit the metal lines (aluminum or copper) fast and at low temperatures. However, the lines (films) usually consist of undesirable columns and voids, because of the absence of sufficient diffusion—a direct result of large kinetic barriers. Following the proposal and realization of the three-dimensional Ehrlich-Schwoebel (3D ES) barrier, we present here a method to engineer this kinetic barrier so as to improve quality of deposited copper films. We deposit copper films by magnetron sputtering, characterize the film structure and texture by using the scanning electron microscope and the x-ray diffraction, respectively. Taking indium as surfactant during copper deposition, we have achieved much better density and bottom coverage of copper filled trenches. The characterizations show that the improvement is the result of the 3D ES barrier reduction caused by indium addition. Engineering the 3D ES barrier therefore leads to improved film quality.
URI: http://hdl.handle.net/10397/4525
ISSN: 0003-6951 (print)
1077-3118 (online)
DOI: 10.1063/1.1527226
Rights: © 2002 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Hanchen Huang et al, Appl. Phys. Lett. 81, 459 (2002) and may be found at http://link.aip.org/link/?apl/81/4359
Appears in Collections:Journal/Magazine Article

Files in This Item:
File Description SizeFormat 
Huang_Kinetic_Barriers_Copper.pdf440.64 kBAdobe PDFView/Open
Access
View full-text via PolyU eLinks SFX Query
Show full item record

SCOPUSTM   
Citations

22
Last Week
0
Last month
Citations as of Feb 7, 2016

WEB OF SCIENCETM
Citations

24
Citations as of Feb 14, 2016

Page view(s)

282
Checked on Feb 14, 2016

Download(s)

162
Checked on Feb 14, 2016

Google ScholarTM
Citations

loading...

Altmetric



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.