Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/441
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dc.contributorDepartment of Applied Physics-
dc.contributorMaterials Research Centre-
dc.creatorLam, TY-
dc.creatorLau, ST-
dc.creatorChao, C-
dc.creatorChan, HLW-
dc.creatorChoy, CL-
dc.creatorCheung, WY-
dc.creatorWong, SP-
dc.date.accessioned2014-12-11T08:27:53Z-
dc.date.available2014-12-11T08:27:53Z-
dc.identifier.issn0003-6951-
dc.identifier.urihttp://hdl.handle.net/10397/441-
dc.language.isoenen_US
dc.publisherAmerican Institute of Physicsen_US
dc.rights© 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in T.Y. Lam et al. Appl. Phys. Lett. 90, 043511 (2007) and may be found at http://link.aip.org/link/?apl/90/043511en_US
dc.subjectPolymer blendsen_US
dc.subjectPolymer filmsen_US
dc.subjectProton effectsen_US
dc.subjectLight interferometryen_US
dc.subjectElectrostrictionen_US
dc.subjectMicromachiningen_US
dc.subjectMicroactuatorsen_US
dc.titleCharacterization of proton irradiated copolymer thin films for microelectromechanical system applicationsen_US
dc.typeJournal/Magazine Articleen_US
dc.identifier.spage1-
dc.identifier.epage3-
dc.identifier.volume90-
dcterms.abstractThe electrostrictive response of proton irradiated poly vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] thin films, deposited on silicon (Si) substrates, has been characterized. By applying an ac field to the copolymer films, the induced surface displacement of the film along the thickness direction was measured using a laser interferometer. After the proton irradiation, the electric field induced strain response of the copolymer film is enhanced. Since the copolymer films are laterally clamped by the rigid substrate, the films cannot vibrate freely. At a proton dose of 50 Mrad, the effective electrostrictive coefficient M[sub eff,33] of P(VDF-TrFE) thin film on Si is 0.07 10[sup -18] V²/m² which is ~25 times smaller than that of bulk sample under the same irradiation dose (M[sub 33]=1.76x10[sup −18] V²/m²). Using bulk micromachining to etch away most of the Si substrate, an actuator in the form of a suspended membrane was fabricated. The effective electrostrictive coefficient at the center of the membrane M[sub eff,33] increased to 0.67x10[sup −18] V²/m² due to the weakening of the substrate clamping effect. The resonance characteristics of the actuators based on these irradiated copolymer films were studied.-
dcterms.accessRightsopen accessen_US
dcterms.bibliographicCitationApplied physics letters, 25 Jan. 2007, v. 90, 043511, p. 1-3-
dcterms.isPartOfApplied physics letters-
dcterms.issued2007-01-25-
dc.identifier.isiWOS:000243789600111-
dc.identifier.scopus2-s2.0-33846633777-
dc.identifier.eissn1077-3118-
dc.identifier.rosgroupidr32296-
dc.description.ros2006-2007 > Academic research: refereed > Publication in refereed journal-
dc.description.oaVersion of Recorden_US
dc.identifier.FolderNumberOA_IR/PIRAen_US
dc.description.pubStatusPublisheden_US
dc.description.oaCategoryVoR alloweden_US
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