Please use this identifier to cite or link to this item:
Title: Improved performance of Pd/WO<inf>3</inf>/SiC schottky-diode hydrogen gas sensor by using fluorine plasma treatment
Authors: Liu, Y
Tang, WM 
Lai, PT
Issue Date: 2015
Source: Applied physics letters, 2015, v. 107, no. 7, 73506, p. 073506-1-073506-4
Abstract: A high-performance Pd/WO<inf>3</inf>/SiC Schottky-diode hydrogen gas sensor was fabricated by using fluorine plasma treatment on the WO<inf>3</inf> film. From the electrical measurements under various hydrogen concentrations and temperatures, the plasma-treated sensor exhibited a maximum barrier-height change of 279meV and a static gas sensitivity of more than 30000, which is 30 times higher than that of the untreated sensor. This significant improvement is attributed to the larger adsorption area caused by the plasma-roughened WO<inf>3</inf> film and the lower baseline leakage current induced by fluorine passivation of oxide traps. Additionally, the kinetics analysis and hydrogen coverage of the devices were studied to demonstrate the temperature dependence of the gas sensing behaviors. The hydrogen adsorption enthalpy at the Pd-WO<inf>3</inf> interface significantly decreased from -31.2kJ/mol to -57.6kJ/mol after the plasma treatment. Therefore, the adsorption process on the plasma-treated sample is much easier and the suppression of sensing properties is more obvious at elevated temperatures above 423K.
Publisher: American Institute of Physics
Journal: Applied physics letters 
ISSN: 0003-6951
EISSN: 1077-3118
DOI: 10.1063/1.4929428
Rights: © 2015 AIP Publishing LLC.
This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Y. Liu, W. M. Tang and P. T. Lai, Appl. Phys. Lett. 107, 073506 (2015) and may be found at
Appears in Collections:Journal/Magazine Article

Files in This Item:
File Description SizeFormat 
Liu_Schottky-diode_Hydrogen_Gas.pdf1.16 MBAdobe PDFView/Open
View full-text via PolyU eLinks SFX Query
Show full item record
PIRA download icon_1.1View/Download Full Text


Last Week
Last month
Citations as of Aug 29, 2020


Last Week
Last month
Citations as of Sep 15, 2020

Page view(s)

Last Week
Last month
Citations as of Sep 16, 2020


Citations as of Sep 16, 2020

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.