Please use this identifier to cite or link to this item:
http://hdl.handle.net/10397/31213
DC Field | Value | Language |
---|---|---|
dc.contributor | Department of Applied Biology and Chemical Technology | - |
dc.creator | Bulcourt, N | - |
dc.creator | Booth, JP | - |
dc.creator | Hudson, EA | - |
dc.creator | Luque, J | - |
dc.creator | Mok, DKW | - |
dc.creator | Lee, EP | - |
dc.creator | Chau, FT | - |
dc.creator | Dyke, JM | - |
dc.date.accessioned | 2015-06-23T09:13:49Z | - |
dc.date.available | 2015-06-23T09:13:49Z | - |
dc.identifier.issn | 0021-9606 | - |
dc.identifier.uri | http://hdl.handle.net/10397/31213 | - |
dc.language.iso | en | en_US |
dc.publisher | American Institute of Physics | en_US |
dc.rights | © 2004 American Institute of Physics. | en_US |
dc.rights | This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in N. Bulcourt et al., J. Chem. Phys. 120, 9499 (2004) and may be found at https://dx.doi.org/10.1063/1.1695313 | en_US |
dc.title | Use of the ultraviolet absorption spectrum of CF 2 to determine the spatially resolved absolute CF 2 density, rotational temperature, and vibrational distribution in a plasma etching reactor | en_US |
dc.type | Journal/Magazine Article | en_US |
dc.identifier.spage | 9499 | - |
dc.identifier.epage | 9508 | - |
dc.identifier.volume | 120 | - |
dc.identifier.issue | 20 | - |
dc.identifier.doi | 10.1063/1.1695313 | - |
dcterms.abstract | The CF 2 densities in a plasma etch reactor used for industrial wafer processing were determined using broadband ultraviolet absorption spectroscopy. The absorption cross sections of CF 2 at selected wavelengths, used for calculating the number densities from the experimental spectra were determined using Franck Condon factors. The number densities of CF 2 were also determined in different regions of the plasma, including the center of the plasma and outside the plasma volume. The CF 2 rotational temperatures and vibrational energy distributions were also estimated. | - |
dcterms.accessRights | open access | en_US |
dcterms.bibliographicCitation | Journal of chemical physics, 2004, v. 120, no. 20, p. 9499-9508 | - |
dcterms.isPartOf | Journal of chemical physics | - |
dcterms.issued | 2004 | - |
dc.identifier.scopus | 2-s2.0-2942529083 | - |
dc.identifier.eissn | 1089-7690 | - |
dc.identifier.rosgroupid | r19918 | - |
dc.description.ros | 2003-2004 > Academic research: refereed > Publication in refereed journal | - |
dc.description.oa | Version of Record | en_US |
dc.identifier.FolderNumber | OA_IR/PIRA | en_US |
dc.description.pubStatus | Published | en_US |
Appears in Collections: | Journal/Magazine Article |
Files in This Item:
File | Description | Size | Format | |
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Bulcourt_Ultraviolet_Absorption_CF2.pdf | 580.86 kB | Adobe PDF | View/Open |
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