Please use this identifier to cite or link to this item:
Title: Method and apparatus for measuring oscillation amplitude of an ultrasonic device
Authors: Chan, HLW 
Lam, TY
Chao, C
Kwok, KW 
Issue Date: 26-Oct-2010
Source: US Patent 7,819,013 B2. Washington, DC: US Patent and Trademark Office, 2010. How to cite?
Abstract: An apparatus and method for detecting the oscillation amplitude of a bonding tool includes a sensing unit disposed adjacent to and at a distance from the bonding tool. The sensing unit includes a pair of electrodes, a piezoelectric sensing layer located between the pair of electrodes, and a membrane associated with the piezoelectric sensing layer. The piezoelectric sensing layer becomes sensitive to ultrasonic vibrations and generates electrical voltage signals after being activated by a poling process. An optional pre-amplifier is used to amplify the signals generated from the sensing unit, and an oscilloscope is used to further process the signals.
Rights: Assignee: The Hong Kong Polytechnic University.
Appears in Collections:Patent

Files in This Item:
File Description SizeFormat 
us7819013b2.pdf425.78 kBAdobe PDFView/Open
Show full item record

Page view(s)

Last Week
Last month
Checked on Oct 16, 2016


Checked on Oct 16, 2016

Google ScholarTM


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.