Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/2463
Title: Method and apparatus for measuring oscillation amplitude of an ultrasonic device
Authors: Chan, HLW
Lam, TY
Chao, C
Kwok, KW
Issue Date: 26-Oct-2010
Source: US Patent 7,819,013 B2. Washington, DC: US Patent and Trademark Office, 2010. How to cite?
Abstract: An apparatus and method for detecting the oscillation amplitude of a bonding tool includes a sensing unit disposed adjacent to and at a distance from the bonding tool. The sensing unit includes a pair of electrodes, a piezoelectric sensing layer located between the pair of electrodes, and a membrane associated with the piezoelectric sensing layer. The piezoelectric sensing layer becomes sensitive to ultrasonic vibrations and generates electrical voltage signals after being activated by a poling process. An optional pre-amplifier is used to amplify the signals generated from the sensing unit, and an oscilloscope is used to further process the signals.
URI: http://hdl.handle.net/10397/2463
Rights: Assignee: The Hong Kong Polytechnic University.
Appears in Collections:Patent

Files in This Item:
File Description SizeFormat 
us7819013b2.pdf425.78 kBAdobe PDFView/Open
Show full item record

Page view(s)

806
Checked on Feb 7, 2016


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.