Please use this identifier to cite or link to this item:
http://hdl.handle.net/10397/2463
DC Field | Value | Language |
---|---|---|
dc.contributor | Department of Applied Physics | - |
dc.creator | Chan, HLW | - |
dc.creator | Lam, TY | - |
dc.creator | Chao, C | - |
dc.creator | Kwok, KW | - |
dc.date.accessioned | 2010-12-08T07:04:33Z | - |
dc.date.available | 2010-12-08T07:04:33Z | - |
dc.identifier.uri | http://hdl.handle.net/10397/2463 | - |
dc.language.iso | en | en_US |
dc.rights | Assignee: The Hong Kong Polytechnic University. | en_US |
dc.title | Method and apparatus for measuring oscillation amplitude of an ultrasonic device | en_US |
dc.type | Patent | en_US |
dc.description.otherinformation | US7819013; US7819013 B2; US7819013B2; US7,819,013; US 7,819,013 B2; 7819013; Appl. No. 11/481,205 | en_US |
dc.description.otherinformation | Inventor name used in this publication: Helen Lai Wa Chan | en_US |
dc.description.otherinformation | Inventor name used in this publication: Tin Yan Lam | en_US |
dc.description.otherinformation | Inventor name used in this publication: Kin Wing Kwok | en_US |
dcterms.abstract | An apparatus and method for detecting the oscillation amplitude of a bonding tool includes a sensing unit disposed adjacent to and at a distance from the bonding tool. The sensing unit includes a pair of electrodes, a piezoelectric sensing layer located between the pair of electrodes, and a membrane associated with the piezoelectric sensing layer. The piezoelectric sensing layer becomes sensitive to ultrasonic vibrations and generates electrical voltage signals after being activated by a poling process. An optional pre-amplifier is used to amplify the signals generated from the sensing unit, and an oscilloscope is used to further process the signals. | - |
dcterms.bibliographicCitation | US Patent 7,819,013 B2. Washington, DC: US Patent and Trademark Office, 2010. | - |
dcterms.issued | 2010-10-26 | - |
dc.description.country | US | - |
dc.description.oa | Version of Record | en_US |
Appears in Collections: | Patent |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
us7819013b2.pdf | 425.78 kB | Adobe PDF | View/Open |
Page views
109
Last Week
0
0
Last month
Citations as of Mar 24, 2024
Downloads
77
Citations as of Mar 24, 2024
Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.