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http://hdl.handle.net/10397/100588
| Title: | Optically 3-D μ-printed ferrule-top polymer suspended-mirror devices | Authors: | Yao, M Wu, J Zhang, AP Tam, HY Wai, PKA |
Issue Date: | 15-Nov-2017 | Source: | IEEE sensors journal, 15 Nov. 2017, v. 17, no. 22, p. 7257-7261 | Abstract: | We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated. | Keywords: | 3D printed sensor Optical microfabrication Suspended-mirror device |
Publisher: | Institute of Electrical and Electronics Engineers | Journal: | IEEE sensors journal | ISSN: | 1530-437X | DOI: | 10.1109/JSEN.2017.2737551 | Rights: | ©2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The following publication M. Yao, J. Wu, A. P. Zhang, H. Tam and P. K. A. Wai, "Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices," in IEEE Sensors Journal, vol. 17, no. 22, pp. 7257-7261, 15 Nov. 2017 is available at https://doi.org/10.1109/JSEN.2017.2737551. |
| Appears in Collections: | Journal/Magazine Article |
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|---|---|---|---|---|
| Yao_Optically_3-D_Ferrule-Top.pdf | Pre-Published version | 1.88 MB | Adobe PDF | View/Open |
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