Please use this identifier to cite or link to this item:
http://hdl.handle.net/10397/6306
Title: | Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance | Other Title: | 具有增加的有效电容的柔性电容式微加工超声换能器阵列 | Authors: | Cheng, CH Chao, C |
Issue Date: | 6-Nov-2013 | Source: | 中国专利 ZL 201080041013.3 | Abstract: | A Capacitive Micromachined Ultrasonic Transducer (CMUT) (200) comprises a membrane (220) operatively connected to a top electrode (210) and a bottom electrode having a concave void (230). When a Direct Current (DC) bias voltage is applied, the membrane (220) is deflected towards the bottom electrode so that a peripheral edge region of the membrane (220) is closer to the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane (220) is increased. 一种电容式微加工超声换能器(CMUT)(200),该电容器微加工超声换能器包括:操作地连接至顶部电极(210)的薄膜(220)和具有凹穴(230)的底部电极。在施加直流(DC)偏压时,所述薄膜(220)朝向所述底部电极挠曲,使得所述薄膜(220)的周边边缘区域接近所述底部电极,并且所述薄膜的所述周边边缘区域附近的静电力得到增加。 |
Publisher: | 中华人民共和国国家知识产权局 | Rights: | 专利权人: The Hong Kong Polytechnic University. |
Appears in Collections: | Patent |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
ZL201080041013.3.pdf | 2.05 MB | Adobe PDF | View/Open |
Page views
204
Last Week
0
0
Last month
Citations as of Jun 4, 2023
Downloads
26
Citations as of Jun 4, 2023

Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.