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http://hdl.handle.net/10397/6306
| Title: | Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance | Other Title: | 具有增加的有效电容的柔性电容式微加工超声换能器阵列 | Authors: | Cheng, CH Chao, C |
Issue Date: | 6-Nov-2013 | Source: | 中国专利 ZL 201080041013.3 | Abstract: | A Capacitive Micromachined Ultrasonic Transducer (CMUT) (200) comprises a membrane (220) operatively connected to a top electrode (210) and a bottom electrode having a concave void (230). When a Direct Current (DC) bias voltage is applied, the membrane (220) is deflected towards the bottom electrode so that a peripheral edge region of the membrane (220) is closer to the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane (220) is increased. 一种电容式微加工超声换能器(CMUT)(200)，该电容器微加工超声换能器包括：操作地连接至顶部电极(210)的薄膜(220)和具有凹穴(230)的底部电极。在施加直流(DC)偏压时，所述薄膜(220)朝向所述底部电极挠曲，使得所述薄膜(220)的周边边缘区域接近所述底部电极，并且所述薄膜的所述周边边缘区域附近的静电力得到增加。 |
Publisher: | 中华人民共和国国家知识产权局 | Rights: | 专利权人: The Hong Kong Polytechnic University. |
| Appears in Collections: | Patent |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| ZL201080041013.3.pdf | 2.05 MB | Adobe PDF | View/Open |
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