Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance

Abstract

A Capacitive Micromachined Ultrasonic Transducer (CMUT) (200) comprises a membrane (220) operatively connected to a top electrode (210) and a bottom electrode having a concave void (230). When a Direct Current (DC) bias voltage is applied, the membrane (220) is deflected towards the bottom electrode so that a peripheral edge region of the membrane (220) is closer to the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane (220) is increased. 一种电容式微加工超声换能器(CMUT)(200)，该电容器微加工超声换能器包括：操作地连接至顶部电极(210)的薄膜(220)和具有凹穴(230)的底部电极。在施加直流(DC)偏压时，所述薄膜(220)朝向所述底部电极挠曲，使得所述薄膜(220)的周边边缘区域接近所述底部电极，并且所述薄膜的所述周边边缘区域附近的静电力得到增加。