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Title: Thin-film phase shifter for micro-wave filter network and preparation
Other Title: 微波滤波网络薄膜移相器及其制备方法
Authors: Wang, Y 
Chan, HLW 
Chen, X
Issue Date: 25-Jul-2012
Source: 中国专利 ZL 200710149651.7
Abstract: The invention discloses a thin-film phase shifter of a microwave filter network and a manufacturing method, wherein the phase shifter is formed by a substrate, a ferroelectric thin film, a surface electrode and a base electrode and has a multi-layer structure of a microwave filter network, and the microwave filter network is formed by a changeable distribution parameter portion and a non-changeable distribution parameter portion, wherein the changeable distribution parameter portion of the microwave filter network is formed on the ferroelectric thin film, and the non-changeable distribution parameter portion of the microwave filter network is formed on the substrate. The thin-film phase shifter achieves microwave phase shift through changing distributed capacitance parameter values in networks. In addition, the ferroelectric thin film which is chosen by the thin-film phase shifter is a barium titanate zirconate thin film. And therefore, the invention has the advantages of stable performance, excellent impedance matching, low loss, simple circuit topology, easy achieving technique, small size and light weight.
Publisher: 中华人民共和国国家知识产权局
Rights: 专利权人: The Hong Kong Polytechnic University.
Appears in Collections:Patent

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