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Title: An integrated microfluidic chip with 40 MHz lead-free transducer for fluid analysis
Authors: Lee, STF
Lam, KS
Lei, L
Zhang, X 
Chan, HLW 
Issue Date: Feb-2011
Source: Review of scientific instruments, Feb. 2011, v. 82, no. 2, 024903, p. 1-4
Abstract: The design, fabrication, and evaluation of a high-frequency transducer made from lead-free piezoceramic for the application of microfluidic analysis is described. Barium strontium zirconate titanate [(Ba₀. ₉ ₅Sr₀. ₀ ₅)(Zr₀. ₀ ₅Ti₀.₉₅)O₃, abbreviated as BSZT] ceramic has been chosen to be the active element of the transducer. The center frequency and bandwidth of this high-frequency ultrasound transducer have been measured to be 43 MHz and 56.1%, respectively. The transducer was integrated into a microfluidic channel and used to measure the sound velocity and attenuation of the liquid flowing in the channel. Results suggest that lead-free high-frequency transducers could be used for in situ analysis of property of the fluid flowing through the microfluidic system.
Keywords: Barium
Barium strontium titanate
Barium titanate
Barium zirconate
Fluidic devices
Strontium titanates
Ultrasonic transducers
Publisher: American Institute of Physics
Journal: Review of scientific instruments 
ISSN: 0034-6748
EISSN: 1089-7623
DOI: 10.1063/1.3553575
Rights: © 2011 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in S.T.F. Lee et al., Rev. Sci. Instrum. 82, 024903 (2011) and may be found at
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