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Title: An approach to on-machine motion error measurement of a linear slide
Authors: Fung, EHK
Yang, SM
Issue Date: 2001
Source: Measurement, 2001, v. 29, no. 1, p. 51-62
Abstract: A new system is proposed to measure the straightness motion error of a precision linear slide for the purpose of active error compensation (AEC). In the traditional method, where the slide profile is assumed constant, its motion error can be obtained simply by subtracting the profile data from the output of a displacement sensor. However, under on-machine conditions, such pre-calibrated profiles or references are not reliable, due to deviations from the calibration conditions. To overcome this difficulty, information on multiple displacement sensors is employed to construct an ideal software datum that can be used on-line in AEC. Such a software datum can act as an ideal reference for separating the profile from the motion errors. The characteristics of the proposed method are: (1) the profile is determined under on-machine conditions requiring no pre-calibrations; (2) a novel approach to represent the test section of the profile by one cycle of a periodic function is facilitated by specially arranging three sensors to form a stationary stage. Computer simulations are performed to confirm the feasibility of the method. A measurement system consisting of three non-contact capacitive sensors is built and evaluated experimentally on a laboratory lathe and good repeatability of profile results is obtained.
Keywords: On-machine measurement
Straightness motion error
Precision linear slide
Multi sensor
Fourier series method
Publisher: Elsevier Sci Ltd
Journal: Measurement 
ISSN: 0263-2241
DOI: 10.1016/S0263-2241(00)00027-0
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