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Title: Effects of CaRuO3 electrode on the dielectric properties of (Ba,Sr) TiO3 thin films
Authors: Xiong, HF
Tang, XG
Yi, SP
Fan, YC
Jiang, LL
Chan, HLW 
Keywords: BST thin film
Dielectric tunability
Pulsed laser deposition (PLD)
Issue Date: 2007
Publisher: 中國學術期刊 (光盤版) 電子雜誌社
Source: 功能材料與器件學報 (Journal of functional materials and devices), 2007, v. 13, no. 3, p. 266-270 How to cite?
Journal: 功能材料與器件學報 (Journal of functional materials and devices) 
Abstract: The highly (110) -oriented (Ba0.65Sr0.35) TiO3 (BST)/CaRuO3 (CRO) heterostructure thin films on Pt/Ti/SiO2/Si substrates were prepared by pulsed laser deposition (PLD). The surface morphology of BST/CRO heterostructure thin film show many grain clusters, with cluster size up to 500 nm, which were composed by nano-sized grains in size of about 60-80 nm. It also revealed that a dense, homogenous, uniform microstructure, smooth and pinhole-free surface morphology was obtained in the BST/CRO heterostructure thin films on Pt/Ti/SiO2/Si substrates. The dielectric constant and tunabilities of BST/CRO heterostructure thin films were 851 and 78.1%, respectively. Compared with single composition BST thin films, the CRO bottom electrodes enhanced the dielectric properties and tunabilities.
ISSN: 1007-4252
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