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Title: Optically 3-D mu-printed ferrule-top polymer suspended-mirror devices
Authors: Yao, M 
Wu, JS 
Zhang, AP 
Tam, HY 
Wai, PKA 
Keywords: Optical microfabrication
Suspended-mirror device
3D printed sensor
Issue Date: 2017
Publisher: Institute of Electrical and Electronics Engineers
Source: IEEE sensors journal, 2017, v. 17, no. 22, p. 7257-7261 How to cite?
Journal: IEEE sensors journal 
Abstract: We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D mu-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.
ISSN: 1530-437X
EISSN: 1558-1748
DOI: 10.1109/JSEN.2017.2737551
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