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Title: Investigation of the heating behavior of carbide-bonded graphene coated silicon wafer used for hot embossing
Authors: Yang, G 
Li, L 
Lee, WB 
Ng, MC 
Chan, CY 
Keywords: Carbide-bonded graphene
Heating behavior
Hot embossing
Mold coating
Issue Date: 2018
Publisher: Elsevier B.V.
Source: Applied surface science, 2018, v. 435, p. 130-140 How to cite?
Journal: Applied surface science 
Abstract: A recently developed carbide-bonded graphene (CBG) coated silicon wafer was found to be an effective micro-patterned mold material for implementing rapid heating in hot embossing processes owing to its superior electrical and thermal conductivity, in addition to excellent mechanical properties. To facilitate the achievement of precision temperature control in the hot embossing, the heating behavior of a CBG coated silicon wafer sample was experimentally investigated. First, two groups of controlled experiments were conducted for quantitatively evaluating the influence of the main factors such as the vacuum pressure and gaseous environment (vacuum versus nitrogen) on its heating performance. The electrical and thermal responses of this sample under a voltage of 60 V were then intensively analyzed, and revealed that it had somewhat semi-conducting properties. Further, we compared its thermal profiles under different settings of the input voltage and current limiting threshold. Moreover, the strong temperature dependence of electrical resistance for this material was observed and determined. Ultimately, the surface temperature of CBG coated silicon wafer could be as high as 1300 ℃, but surprisingly the graphene coating did not detach from the substrate under such an elevated temperature due to its strong thermal coupling with the silicon wafer.
ISSN: 0169-4332
EISSN: 1873-5584
DOI: 10.1016/j.apsusc.2017.11.050
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