Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/74605
Title: Tunability of Pd-nanogapped H2 sensors made on SiO2-coated Si micropillar arrays
Authors: Zhao, M
Wong, MH 
Ong, CW 
Ng, NH 
Man, HC 
Keywords: Hydrogen sensor
Micro-nano hybrid technique
Pd nanogap
Si micropillar
Tunable performance
Issue Date: 2018
Publisher: Elsevier
Source: Sensors and actuators. B, Chemical, 2018, v. 255, p. 944-951 How to cite?
Journal: Sensors and actuators. B, Chemical 
Abstract: A micro-nano hybrid technique is implemented to produce Pd-nanogapped gas sensors with tunable H2 sensing properties. The basic idea is to deposit a Pd film on a SiO2-coated Si micropillar array. By adjusting the SiO2-gap size and Pd film thickness, one can tune the size and distribution of the nanogaps in the Pd film precisely to achieve the desired gas sensing performances. With this approach, sensors of three different configurations were fabricated to go through the tests for 0–6% H2 at 40 °C. Different sensor types were found to give respective dynamic range of detection, shape of sensor response and mode of operation. The sensor type designed to contain an Au/Cr buffer layer exhibits a detection limit of 20 ppm of H2. The method is scalable and compatible with Si-based micromachining processes. The design is also extendable for making multi-sensor arrays. The physical mechanisms involved in controlling the sensor properties are proposed and discussed.
URI: http://hdl.handle.net/10397/74605
ISSN: 0925-4005
EISSN: 1873-3077
DOI: 10.1016/j.snb.2017.08.108
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