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Title: A MEMS switch with novel stopper structure and improved fabrication processes for power applications
Authors: Zhang, M
Chong, PF
Cheng, CH 
Issue Date: 2016
Source: 2016 8th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2016), Kanazawa, Japan, 26-29 June 2016, M.55 (Poster) How to cite?
Appears in Collections:Conference Paper

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