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Title: Optical 3D μ-printing of ferrule-top polymer suspended-mirror devices
Authors: Yao, M
Wai, PKA 
Wu, J
Zhang, AP 
Tam, HY 
Keywords: 3D printed sensor
Optical microfabrication
Suspended-mirror device
Issue Date: 2017
Publisher: Institute of Electrical and Electronics Engineers Inc.
Source: Proceedings of IEEE Sensors, 2017, 7808491 How to cite?
Abstract: We present a novel optical printing technology for rapid fabrication of polymer suspended-mirror devices (SMDs) on the end surface of a ferrule of optical fiber connector. With the own-developed 3D μ-printing technology, three kinds of ferrule-top SMDs have been rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SU-8 SMDs are measured. The application of SMDs as a highly sensitive displacement sensor is experimentally demonstrated.
Description: 15th IEEE Sensors Conference, SENSORS 2016, Orlando, US, 30 October - 2 November 2016
ISBN: 9781479982875
ISSN: 1930-0395
DOI: 10.1109/ICSENS.2016.7808491
Appears in Collections:Conference Paper

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