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Title: Capacitive micromachined ultrasonic transducer (CMUT) with graphene membrane
Authors: Chong, PF
Shi, X
Cheng, CH 
Keywords: Bonding
High frequency
Issue Date: 2016
Publisher: IEEE Computer Society
Source: IEEE International Ultrasonics Symposium, IUS, 2016, v. 2016-November, 7728516 How to cite?
Abstract: This paper presents fabrication methods using graphene as a membrane that was thermally bonded on top of the CMUT cavity formed by patterned photoresist. The impedance measurement result showed graphene CMUT exhibit high resonance frequency when membrane size remains large. Previously we had also reported such a graphene CMUT with stiction problem caused by a graphene transfer technique. In the newly fabricated CMUT, different methods are used to protect the graphene membrane and stiction problem was solved by bonding in air. The resonant frequencies of the fabricated graphene CMUT with membrane sizes of 500μm and 90μm are found to be 45MHz and 63MHz respectively in air.
Description: 2016 IEEE International Ultrasonics Symposium, IUS 2016, France, 18-21 September 2016
ISBN: 9781467398978
ISSN: 1948-5719
DOI: 10.1109/ULTSYM.2016.7728516
Appears in Collections:Conference Paper

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