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Title: Redundantly piezo-actuated XYθz compliant mechanism for nano-positioning featuring simple kinematics, bi-directional motion and enlarged workspace
Authors: Zhu, WL
Zhu, Z 
To, S 
Liu, Q
Ju, BF
Zhou, X
Keywords: Enlarged workspace
Finite element theory
Flexible beams
Nano-positioning stage
Redundant actuation
Issue Date: 2016
Publisher: Institute of Physics Publishing
Source: Smart materials and structures, 2016, v. 25, no. 12, 125002 How to cite?
Journal: Smart materials and structures 
Abstract: This paper presents a novel redundantly piezo-actuated three-degree-of-freedom XYθ z compliant mechanism for nano-positioning, driven by four mirror-symmetrically configured piezoelectric actuators (PEAs). By means of differential motion principle, linearized kinematics and physically bi-directional motions in all the three directions are achieved. Meanwhile, the decoupled delivering of three-directional independent motions at the output end is accessible, and the essential parallel and mirror symmetric configuration guarantees large output stiffness, high natural frequencies, high accuracy as well as high structural compactness of the mechanism. Accurate kinematics analysis with consideration of input coupling indicates that the proposed redundantly actuated compliant mechanism can generate three-dimensional (3D) symmetric polyhedral workspace envelope with enlarged reachable workspace, as compared with the most common parallel XYθ z mechanism driven by three PEAs. Keeping a high consistence with both analytical and numerical models, the experimental results show the working ranges of ±6.21 μm and ±12.41 μm in X- and Y-directions, and that of ±873.2 μrad in θ z-direction with nano-positioning capability can be realized. The superior performances and easily achievable structure well facilitate practical applications of the proposed XYθz compliant mechanism in nano-positioning systems.
ISSN: 0964-1726
EISSN: 1361-665X
DOI: 10.1088/0964-1726/25/12/125002
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